Abstract: In order to enhance the luminescence performance of ZnO film, the ZnO thin films with different TiO₂ modification layers on 3 layers and 6 layers ZnO substrates were prepared by sol-gel method.The crystal structure and optical properties of the samples were studied.The results show that all samples showed obvious amorphous state.The number of modified layers has a great influence on the uv luminescence intensity of ZnO films.When air annealing, the best modification layers number of 3 layers ZnO substrates is 1 layer, and the best number of 6 layers ZnO substrates is 3 layers.In vacuum annealing, the best number of modification layers is 2.The uv luminescence intensity of the films can be increased by up to 10 times.The average visible transmittance of all samples reached over 80%.The modification layers and annealing method have little effect on the film transmittance.