Abstract: The objective of this study is to investigate the influence of key parameters on the gas production efficiency of 70 MPa hydrogen diaphragm compressor. Through the establishment of AMESim one-dimensional simulation model, the influence of three key parameters of RPM, intake pressure and intake temperature on gas production efficiency is systematically analyzed. The results show that the maximum hydrogen pressure and gas production rate increase significantly with the increase of RPM, and are positively correlated with the intake pressure and negatively correlated with the intake temperature. The gas production has nothing to do with the RPM, but it is positively correlated with the intake pressure and negatively correlated with the intake temperature. The maximum hydrogen temperature is not sensitive to the change of rotational speed, and is negatively correlated with the intake pressure and positively correlated with the intake temperature. The gas production efficiency is less affected by the rotational speed, and increases with the increase of the intake pressure. When the rotational speed is 900 r/min, the maximum increase is 0.21 g/kJ, and decreases with the increase of the intake temperature. When the rotational speed is 300 r/min, the maximum decrease is 0.07 g/kJ.