Research of TiC Coatings on Cemented Carbide by HT-CVD
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Abstract
TiC composite coating were prepared on the YG8 substrate with high temperature chemical vapor deposition (HT-CVD) method.Effects of temperature and time, and the flow of H2, H2/CH4 and Ticl4 on the bending strength, strength and microhardness of film, and on the bonding strength of thin film-matrix were investigated.The depositing parameters were optimized through orthogonal test.The results indicate that fine composite coating can be these:deposited at 1000℃ for 90 min, and with the flow of H2 is 400ml, the H2/CH4 is 15:1, the flow of TiCl4 is 80ml, its bending strength is 1100N, its microhardness is 3228HV, the bonding strength of thin film-matrix is 90N.
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