Influence of Different Content of Aluminum in Ti/Al Alloy Targets on Mechanical Properties of TiAlN Films Prepared by Magnetron Sputtering Ion Plating

TiAlN films were deposited on cemented carbide cutting tools with different aluminum content of Ti/Al alloy material. We studied different aluminum content of the target material influence on membrane performance such as the surface roughness, TiAlN film hardness and adhesion strength. Test and analysis of film hardness, adhesion, organization structure and other main performance were conducted respectively by microhardness tester, scratch tester, metallographic microscope, SEM and EDS equipment. Experimental results show that with the increase of Al content in the Ti/Al alloy target, TiAlN film hardness increases firstly and then decreases, and the film adhesion increases gradually. When Al content in the Ti/Al alloy material for the value is 2/3, TiAlN film is of the best comprehensive mechanical properties such as hardness, wear resistance.